Invention Grant
US08900466B2 Method of manufacturing a near-field light generator including a waveguide and a plasmon generator 有权
一种制造包括波导和等离子体发生器的近场光发生器的方法

Method of manufacturing a near-field light generator including a waveguide and a plasmon generator
Abstract:
In a method of manufacturing a near-field light generator, a structure including a core and a polishing stopper layer disposed on the top surface of the core is formed on a first cladding layer. Next, a cladding material layer is formed to cover the first cladding layer and the structure. The cladding material layer is then polished until the polishing stopper layer is exposed. Next, the polishing stopper layer is removed so that the cladding material layer has a protruding portion protruding upward to a higher level than the top surface of the core. The cladding material layer is then polished so as to remove the protruding portion and thereby make the cladding material layer into a second cladding layer. Then, a third cladding layer and a plasmon generator are formed.
Information query
Patent Agency Ranking
0/0