Invention Grant
US08900466B2 Method of manufacturing a near-field light generator including a waveguide and a plasmon generator
有权
一种制造包括波导和等离子体发生器的近场光发生器的方法
- Patent Title: Method of manufacturing a near-field light generator including a waveguide and a plasmon generator
- Patent Title (中): 一种制造包括波导和等离子体发生器的近场光发生器的方法
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Application No.: US13851603Application Date: 2013-03-27
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Publication No.: US08900466B2Publication Date: 2014-12-02
- Inventor: Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Shigeki Tanemura , Kazumasa Yasuda
- Applicant: Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Shigeki Tanemura , Kazumasa Yasuda
- Applicant Address: US CA Milpitas
- Assignee: Headway Technologies, Inc.
- Current Assignee: Headway Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Oliff PLC
- Main IPC: B29D11/00
- IPC: B29D11/00 ; G02B6/122

Abstract:
In a method of manufacturing a near-field light generator, a structure including a core and a polishing stopper layer disposed on the top surface of the core is formed on a first cladding layer. Next, a cladding material layer is formed to cover the first cladding layer and the structure. The cladding material layer is then polished until the polishing stopper layer is exposed. Next, the polishing stopper layer is removed so that the cladding material layer has a protruding portion protruding upward to a higher level than the top surface of the core. The cladding material layer is then polished so as to remove the protruding portion and thereby make the cladding material layer into a second cladding layer. Then, a third cladding layer and a plasmon generator are formed.
Public/Granted literature
- US20140291284A1 METHOD OF MANUFACTURING A NEAR-FIELD LIGHT GENERATOR INCLUDING A WAVEGUIDE AND A PLASMON GENERATOR Public/Granted day:2014-10-02
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