Invention Grant
US08900788B2 Resist composition for immersion exposure and method of forming resist pattern 有权
用于浸渍曝光的抗蚀剂组合物和形成抗蚀剂图案的方法

Resist composition for immersion exposure and method of forming resist pattern
Abstract:
A resist composition for immersion exposure, including: a base component (A) which exhibits changed solubility in an alkali developing solution under action of an acid, and contains no structural unit (c1) represented by the general formula (c1-1) shown below; an acid generator component (B) which generates an acid upon exposure; and a fluorine-containing resin component (C) which contains the structural unit (c1) (in the formula (c1-1), R represents a hydrogen atom, a lower alkyl group, a halogen atom, or a halogenated lower alkyl group; Rf represents a fluorinated alkyl group; and Y0 represents an alkylene group).
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