Invention Grant
US08900788B2 Resist composition for immersion exposure and method of forming resist pattern
有权
用于浸渍曝光的抗蚀剂组合物和形成抗蚀剂图案的方法
- Patent Title: Resist composition for immersion exposure and method of forming resist pattern
- Patent Title (中): 用于浸渍曝光的抗蚀剂组合物和形成抗蚀剂图案的方法
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Application No.: US12445192Application Date: 2007-10-12
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Publication No.: US08900788B2Publication Date: 2014-12-02
- Inventor: Yoshiyuki Utsumi , Yasuhiro Yoshii
- Applicant: Yoshiyuki Utsumi , Yasuhiro Yoshii
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2006-283966 20061018; JP2007-135781 20070522
- International Application: PCT/JP2007/070002 WO 20071012
- International Announcement: WO2008/047729 WO 20080424
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30

Abstract:
A resist composition for immersion exposure, including: a base component (A) which exhibits changed solubility in an alkali developing solution under action of an acid, and contains no structural unit (c1) represented by the general formula (c1-1) shown below; an acid generator component (B) which generates an acid upon exposure; and a fluorine-containing resin component (C) which contains the structural unit (c1) (in the formula (c1-1), R represents a hydrogen atom, a lower alkyl group, a halogen atom, or a halogenated lower alkyl group; Rf represents a fluorinated alkyl group; and Y0 represents an alkylene group).
Public/Granted literature
- US20100009291A1 RESIST COMPOSITION FOR IMMERSION EXPOSURE AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2010-01-14
Information query
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