Invention Grant
- Patent Title: Polymerizable photoacid generators
- Patent Title (中): 可聚合的光酸发生剂
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Application No.: US13339948Application Date: 2011-12-29
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Publication No.: US08900792B2Publication Date: 2014-12-02
- Inventor: James W. Thackeray , Suzanne M. Coley , Vipul Jain , Owendi Ongayi , James F. Cameron , Paul J. Labeaume , Ahmad E. Madkour
- Applicant: James W. Thackeray , Suzanne M. Coley , Vipul Jain , Owendi Ongayi , James F. Cameron , Paul J. Labeaume , Ahmad E. Madkour
- Applicant Address: US MA Marborough US MI Midland
- Assignee: Rohm and Haas Electronic Materials LLC,Dow Global Technologies LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC,Dow Global Technologies LLC
- Current Assignee Address: US MA Marborough US MI Midland
- Agency: Cantor Colburn LLP
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/029 ; C07D333/76 ; G03F7/20 ; C07C309/12 ; C07C309/42 ; C07C381/12 ; G03F7/039 ; C08F220/38

Abstract:
A compound has formula (I): Q-O-(A)-Z−G+ (I) wherein Q is a halogenated or non-halogenated, C2-30 olefin-containing group, A is a fluorine-substituted C1-30 alkylene group, a fluorine-substituted C3-30 cycloalkylene group, a fluorine-substituted C6-30 arylene group, or a fluorine-substituted C7-30 alkylene-arylene group, Z is an anionic group comprising sulfonate, sulfonamide, or sulfonimide, and G+ has formula (II): wherein X is S or I, each R0 is halogenated or non-halogenated and is independently C1-30 alkyl group; a polycyclic or monocyclic C3-30 cycloalkyl group; a polycyclic or monocyclic C4-30 aryl group; or a combination of these, wherein when X is S, one of the R0 groups is optionally attached to one adjacent R0 group by a single bond, and a is 2 or 3, wherein when X is I, a is 2, or when X is S, a is 3. A copolymer, a photoresist, a coated substrate and method of patterning are disclosed.
Public/Granted literature
- US20120171616A1 POLYMERIZABLE PHOTOACID GENERATORS Public/Granted day:2012-07-05
Information query
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