Invention Grant
- Patent Title: Developable bottom anti-reflective coating
- Patent Title (中): 可开发的底部防反射涂层
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Application No.: US13627599Application Date: 2012-09-26
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Publication No.: US08900797B2Publication Date: 2014-12-02
- Inventor: Shigemasa Nakasugi , Shinji Miyazaki , Munirathna Padmanaban , Alberto D. Dioses
- Applicant: Shigemasa Nakasugi , Shinji Miyazaki , Munirathna Padmanaban , Alberto D. Dioses
- Applicant Address: LU Luxembourg
- Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee Address: LU Luxembourg
- Agent Sangya Jain
- Main IPC: C07D251/38
- IPC: C07D251/38 ; C07D213/69 ; C07D213/70 ; C07D239/60 ; C07D251/30 ; G03F7/004 ; G03F7/20
Abstract:
The present invention provides a cross-linking agent capable of preventing formation of scum from a bottom anti-reflective coating, and also provides a composition for forming a bottom anti-reflection coating containing the agent. The cross-linking agent is a nitrogen-containing aromatic compound having at least one vinyloxy group or N-methoxymethylamide group, and the composition contains the cross-linking agent. The cross-linking agent of the formula (1) can be produced by reaction of a nitrogen-containing aromatic compound, a halogen compound having a vinyloxy group or N-methoxymethylamide group and a basic compound.
Public/Granted literature
- US20140087311A1 DEVELOPABLE BOTTOM ANTI-REFLECTIVE COATING Public/Granted day:2014-03-27
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