Invention Grant
- Patent Title: Method for producing a GaNLED device
- Patent Title (中): GaNLED器件的制造方法
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Application No.: US13677891Application Date: 2012-11-15
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Publication No.: US08900800B2Publication Date: 2014-12-02
- Inventor: Nga Phuong Pham , John Slabbekoorn , Deniz Sabuncuoglu Tezcan
- Applicant: IMEC
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Main IPC: G03F7/30
- IPC: G03F7/30 ; H01L33/22 ; G03F7/32

Abstract:
A method for producing a GaNLED device, wherein a stack of layers comprising at least a GaN layer is texturized, is disclosed. The method involves (i) providing a substrate comprising on its surface said stack of layers, (ii) depositing a resist layer directly on said stack, (iii) positioning a mask above said resist layer, said mask covering one or more first portions of said resist layer and not covering one or more second portions of said resist layer, (iv) exposing said second portions of said resist layer to a light source, (v) removing the mask, and (vi) bringing the resist layer in contact with a developer comprising potassium, wherein said developer removes said resist portions that have been exposed and texturizes the surface of at least the top layer of said stack by wet etching said surface, in the areas situated underneath said resist portions that have been exposed.
Public/Granted literature
- US20130130180A1 Method for Producing a GaNLED Device Public/Granted day:2013-05-23
Information query
IPC分类: