Invention Grant
US08901529B2 Memory array with self-aligned epitaxially grown memory elements and annular FET
有权
具有自对准外延生长存储元件和环形FET的存储器阵列
- Patent Title: Memory array with self-aligned epitaxially grown memory elements and annular FET
- Patent Title (中): 具有自对准外延生长存储元件和环形FET的存储器阵列
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Application No.: US13834998Application Date: 2013-03-15
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Publication No.: US08901529B2Publication Date: 2014-12-02
- Inventor: John K. DeBrosse , Chung H. Lam , Janusz J. Nowak
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Ido Tuchman; Vazken Alexanian
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L47/00 ; H01L27/115 ; H01L27/22

Abstract:
A system and method for fabricating a memory array device. An example memory array device includes a plurality of memory cells, each including a FET over a substrate and a memory element over the FET. Each memory element includes a plurality of epitaxially grown memory element layers. The memory array device includes a plurality of gate conductors configured a first axis, in parallel. Each gate conductor laterally surrounds a plurality of FETs of the memory cells along the first axis. The memory array device includes a plurality of bit lines configured along a second axis, in parallel, and electrically coupled to a plurality of memory elements along the second axis. Embodiments of the memory array preserve alignment of crystal lattices beginning from the bottom layers in the FET up to the top active layers in memory element, thus preserving crystal lattice alignment between transistor and memory element.
Public/Granted literature
- US20140264510A1 MEMORY ARRAY WITH SELF-ALIGNED EPITAXIALLY GROWN MEMORY ELEMENTS AND ANNULAR FET Public/Granted day:2014-09-18
Information query
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