Invention Grant
US08901562B2 Radiation imaging device, radiation imaging display system, and transistor 有权
辐射成像装置,放射成像显示系统和晶体管

Radiation imaging device, radiation imaging display system, and transistor
Abstract:
There are provided a transistor and a radiation imaging device in which a shift in a threshold voltage due to radiation exposure may be suppressed. The transistor includes a first gate electrode, a first gate insulator, a semiconductor layer, a second gate insulator, and a second gate electrode in this order on a substrate. Each of the first and second gate insulators includes one or a plurality of silicon compound films having oxygen, and a total sum of thicknesses of the silicon compound films is 65 nm or less.
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