Invention Grant
- Patent Title: Transistor and method of fabricating the same
- Patent Title (中): 晶体管及其制造方法
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Application No.: US13908076Application Date: 2013-06-03
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Publication No.: US08901608B2Publication Date: 2014-12-02
- Inventor: Jong-Won Lim , Hokyun Ahn , Woojin Chang , Dong Min Kang , Seong-Il Kim , Sang-Heung Lee , Hyung Sup Yoon , Chull Won Ju , Hae Cheon Kim , Jae Kyoung Mun , Eun Soo Nam
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2012-0143702 20121211
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L29/66 ; H01L29/778

Abstract:
A high electron mobility transistor includes a T-type gate electrode disposed on a substrate between source and drain electrodes and insulating layers disposed between the substrate and the T-type gate electrode. The insulating layers include first, second, and third insulating layers. The third insulating layer is disposed between the substrate and a head portion of the T-type gate electrode such that a portion of the third insulating layer is in contact with a foot portion of the T-type gate electrode. The second insulating layer is disposed between the substrate and the head portion of the T-type gate electrode to be in contact with the third insulating layer. The first insulating layer and another portion of the third insulating layer are sequentially stacked between the substrate and the head portion of the T-type gate electrode to be in contact with the second insulating layer.
Public/Granted literature
- US20140159115A1 TRANSISTOR AND METHOD OF FABRICATING THE SAME Public/Granted day:2014-06-12
Information query
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