Invention Grant
- Patent Title: Method of manufacturing an IC comprising a plurality of bipolar transistors and IC comprising a plurality of bipolar transistors
- Patent Title (中): 制造包括多个双极晶体管的IC的方法和包括多个双极晶体管的IC
-
Application No.: US13560517Application Date: 2012-07-27
-
Publication No.: US08901669B2Publication Date: 2014-12-02
- Inventor: Hans Mertens , Johannes Theodorus Marinus Donkers , Evelyne Gridelet , Tony Vanhoucke , Petrus Hubertus Cornelis Magnee
- Applicant: Hans Mertens , Johannes Theodorus Marinus Donkers , Evelyne Gridelet , Tony Vanhoucke , Petrus Hubertus Cornelis Magnee
- Applicant Address: NL Eindhoven
- Assignee: NXP, B.V.
- Current Assignee: NXP, B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP11176278 20110802
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A method of manufacturing an integrated circuit comprising bipolar transistors including first and second type bipolar transistors, the method comprising providing a substrate comprising first isolation regions each separated from a second isolation region by an active region comprising a collector impurity of one of the bipolar transistors; forming a base layer stack over the substrate; forming a first emitter cap layer of a first effective thickness over the base layer stack in the areas of the first type bipolar transistor; forming a second emitter cap layer of a second effective thickness different from the first effective thickness over the base layer stack in the areas of the second type bipolar transistor; and forming an emitter over the emitter cap layer of each of the bipolar transistors. An IC in accordance with this method.
Public/Granted literature
Information query
IPC分类: