Invention Grant
US08901683B2 Micro electro mechanical system (MEMS) microphone and fabrication method thereof
有权
微机电系统（MEMS）麦克风及其制造方法
- Patent Title: Micro electro mechanical system (MEMS) microphone and fabrication method thereof
- Patent Title (中): 微机电系统（MEMS）麦克风及其制造方法
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Application No.: US13934661Application Date: 2013-07-03
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Publication No.: US08901683B2Publication Date: 2014-12-02
- Inventor: Chang Han Je
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2012-0107761 20120927
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81C1/00 ; B81B3/00
Abstract:
Provided is a structure for improving performance of a micro electro mechanical system (MEMS) microphone by preventing deformation from occurring due to a residual stress and a package stress of a membrane and by decreasing membrane rigidity. A MEMS microphone according to the present disclosure includes a backplate formed on a substrate; an insulating layer formed on the substrate to surround the backplate; a membrane formed to be separate from above the backplate by a predetermined interval; a membrane supporting portion configured to connect the membrane to the substrate; and a buffering portion formed in a double spring structure between the membrane and the membrane supporting portion.
Public/Granted literature
- US20140084394A1 MICRO ELECTRO MECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION METHOD THEREOF Public/Granted day:2014-03-27
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