Invention Grant
- Patent Title: Electrical device having movable electrode
- Patent Title (中): 具有可动电极的电气装置
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Application No.: US14220356Application Date: 2014-03-20
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Publication No.: US08901709B2Publication Date: 2014-12-02
- Inventor: Takeaki Shimanouchi , Osamu Toyoda , Satoshi Ueda
- Applicant: Fujitsu Limited
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Kratz, Quintos & Hanson, LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L49/02 ; H01L21/687 ; H01L21/683

Abstract:
A movable electric device includes: a first and second fixed electrodes formed on a support substrate, and having opposing electrode surfaces which are substantially perpendicular to the surface of the support substrate, and define a cavity therebetween; a movable member having a movable electrode having a first end disposed near the first fixed electrode and a second end disposed near the second fixed electrode, and bent spring member continuing from at least one of the first and second ends of the movable electrode, and including part which is bent in thickness direction of the movable electrode; and first and second anchors disposed on the support substrate and supporting the movable member at its opposite ends.
Public/Granted literature
- US20140203403A1 ELECTRICAL DEVICE HAVING MOVABLE ELECTRODE Public/Granted day:2014-07-24
Information query
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