Invention Grant
US08901709B2 Electrical device having movable electrode 有权
具有可动电极的电气装置

Electrical device having movable electrode
Abstract:
A movable electric device includes: a first and second fixed electrodes formed on a support substrate, and having opposing electrode surfaces which are substantially perpendicular to the surface of the support substrate, and define a cavity therebetween; a movable member having a movable electrode having a first end disposed near the first fixed electrode and a second end disposed near the second fixed electrode, and bent spring member continuing from at least one of the first and second ends of the movable electrode, and including part which is bent in thickness direction of the movable electrode; and first and second anchors disposed on the support substrate and supporting the movable member at its opposite ends.
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