Invention Grant
- Patent Title: Composite substrate and method for manufacturing the same
- Patent Title (中): 复合基板及其制造方法
-
Application No.: US14228422Application Date: 2014-03-28
-
Publication No.: US08901803B2Publication Date: 2014-12-02
- Inventor: Yuji Hori , Tomoyoshi Tai , Yasunori Iwasaki , Takahiro Yamadera , Ryosuke Hattori , Kengo Suzuki
- Applicant: NGK Insulators, Ltd. , NGK Ceramic Device Co., Ltd.
- Applicant Address: JP Aichi JP Aichi
- Assignee: NGK Insulators, Ltd.,NGK Ceramic Device Co., Ltd.
- Current Assignee: NGK Insulators, Ltd.,NGK Ceramic Device Co., Ltd.
- Current Assignee Address: JP Aichi JP Aichi
- Agency: Cermak Nakajima & McGowan LLP
- Agent Tomoko Nakajima
- Priority: JP2012-250070 20121114
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H03H9/25 ; H01L41/083

Abstract:
The present invention provides a composite substrate comprising a piezoelectric substrate that is a single-crystal lithium tantalate or lithium niobate substrate, a support substrate that is a single-crystal silicon substrate, and an amorphous layer containing argon and joining together the piezoelectric substrate and the support substrate. The amorphous layer includes, in order from the piezoelectric substrate toward the composite substrate, a first layer, a second layer, and a third layer. The first layer contains a larger amount of a constituent element of the piezoelectric substrate than the second and third layers, the third layer contains a larger amount of a constituent element of the support substrate than the first and second layers, and the second layer contains a larger amount of argon than the first and third layers.
Public/Granted literature
- US20140210316A1 Composite Substrate and Method for Manufacturing the Same Public/Granted day:2014-07-31
Information query
IPC分类: