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US08902010B2 Microelectronic machine-based ariable 有权
微电子机为主

Microelectronic machine-based ariable
Abstract:
A tunable resonator is provided that has a high Q for each resonate frequency. The tunable resonator is a MEMs tunable resonator wherein the tuner is affected by moving a moveable mass, associated with the resonating portion of the resonator, form a first position to a second position such that the moveable mass is held in the first position or second position by a detent rather than a constant electromagnet magnetic or electrostatic force applied thereon.
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