Invention Grant
- Patent Title: Projection objective
- Patent Title (中): 投影目标
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Application No.: US12951216Application Date: 2010-11-22
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Publication No.: US08902406B2Publication Date: 2014-12-02
- Inventor: Reinhold Walser , Thomas Schicketanz
- Applicant: Reinhold Walser , Thomas Schicketanz
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102009047179 20091126
- Main IPC: G02B17/06
- IPC: G02B17/06 ; G03F7/20

Abstract:
A projection objective, such as for EUV lithography, for imaging a pattern arranged in an object plane into an image plane with the aid of electromagnetic radiation from the extreme ultraviolet range is provided. The projection objective includes a plurality of mirrors provided with reflective coatings and arranged between the object plane and the image plane. At least one of the mirrors includes a graded reflective coating with a rotationally-asymmetric coating thickness profile in the mirror plane on a substrate with a rotationally-asymmetric or rotationally-symmetric surface profile. The projection objective can exhibit increased overall transmission.
Public/Granted literature
- US20110141446A1 PROJECTION OBJECTIVE Public/Granted day:2011-06-16
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