Invention Grant
- Patent Title: Replacement apparatus for an optical element
- Patent Title (中): 用于光学元件的替换装置
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Application No.: US13920339Application Date: 2013-06-18
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Publication No.: US08902519B2Publication Date: 2014-12-02
- Inventor: Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE10361441 20031223
- Main IPC: G02B7/02
- IPC: G02B7/02 ; G03F7/20 ; G02B7/00 ; G02B13/14 ; G02B7/14
Abstract:
A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
Public/Granted literature
- US20130279029A1 REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT Public/Granted day:2013-10-24
Information query
IPC分类:
| G | 物理 |
| G02 | 光学 |
| G02B | 光学元件、系统或仪器 |
| G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
| G02B7/02 | .用于透镜 |
