Invention Grant
US08903680B2 Apparatus and method for evaluating layers in a multi-layer structure
有权
用于评估多层结构中的层的装置和方法
- Patent Title: Apparatus and method for evaluating layers in a multi-layer structure
- Patent Title (中): 用于评估多层结构中的层的装置和方法
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Application No.: US12965356Application Date: 2010-12-10
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Publication No.: US08903680B2Publication Date: 2014-12-02
- Inventor: John R. Linn , Jeffrey G. Thompson
- Applicant: John R. Linn , Jeffrey G. Thompson
- Applicant Address: US IL Chicago
- Assignee: The Boeing Company
- Current Assignee: The Boeing Company
- Current Assignee Address: US IL Chicago
- Agency: Armstrong Teasdale LLP
- Main IPC: G01B7/02
- IPC: G01B7/02 ; G01B7/14 ; G01N27/90 ; G01N29/265 ; G01B7/06

Abstract:
An apparatus for evaluating layers, including interlayer gaps, in a multi-layer structure; the multi-layer structure presenting a plurality of edges generally aligned athwart an axis; the apparatus includes: (a) a sensing unit configured for sensing at least one parameter; (b) a positioning unit coupled with the sensing unit; the positioning unit being configured to effect moving the sensing unit generally along the axis; and (c) a control unit coupled with at least one of the positioning unit and the sensing unit. The control unit provides an electrical signal to the sensing unit. The control unit monitors changes in the at least one parameter as the sensing unit moves past the plurality of edges. The control unit employs the changes in the at least one parameter to effect the evaluating.
Public/Granted literature
- US20120150466A1 APPARATUS AND METHOD FOR EVALUATING LAYERS IN A MULTI-LAYER STRUCTURE Public/Granted day:2012-06-14
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