Invention Grant
US08904866B2 Microgyroscope for determining rotational motions about at least one of three perpendicular spatial axes
有权
用于确定关于三个垂直空间轴中的至少一个的旋转运动的微型陀螺仪
- Patent Title: Microgyroscope for determining rotational motions about at least one of three perpendicular spatial axes
- Patent Title (中): 用于确定关于三个垂直空间轴中的至少一个的旋转运动的微型陀螺仪
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Application No.: US13319234Application Date: 2010-05-20
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Publication No.: US08904866B2Publication Date: 2014-12-09
- Inventor: Hanno Hammer
- Applicant: Hanno Hammer
- Applicant Address: US CA San Jose
- Assignee: Maxim Integrated Products, Inc.
- Current Assignee: Maxim Integrated Products, Inc.
- Current Assignee Address: US CA San Jose
- Agency: North Weber & Baugh LLP
- Priority: DE102009026511 20090527
- International Application: PCT/EP2010/056959 WO 20100520
- International Announcement: WO2010/136379 WO 20101202
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5755 ; G01C19/5712

Abstract:
A microgyroscope is used to determine rotational motions about at least one of three perpendicular spatial axes x, y, and z. The microgyroscope has a substrate (1) on which multiple masses (2x, 2y, 9) which oscillate parallel to the plane of the substrate (1) in an x-y plane are situated. Some of the oscillating masses (2x, 2y) are attached to the substrate (1) by means of springs and anchorings. Drive elements (4a, 4b) are used to maintain oscillating vibrations of the masses (2x, 2y, 9) which are subjected to Coriolis forces when the substrate (1) rotates about any given spatial axis. Sensor elements detect the deflections of the masses (2x, 2y, 9) due to the Coriolis forces generated. Some of the oscillating masses are x masses (2x) which are also deflectable along the z axis perpendicular to the substrate (1), by means of which they are able to detect yaw rates about the x axis, and/or some of the oscillating masses are y masses (2y) which are also deflectable along the z axis perpendicular to the substrate (1), by means of which they are able to detect yaw rates about the y axis, and/or others of the oscillating masses are z masses (9) which are also deflectable in the x-y plane, but perpendicular to their respective drive direction, by means of which they are able to detect yaw rates about the z axis.
Public/Granted literature
- US20120055248A1 Microgyroscope for Determining Rotational Motions about At Least One of Three Perpendicular Spatial Axes Public/Granted day:2012-03-08
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