Invention Grant
US08906195B2 Tuning hardware for plasma ashing apparatus and methods of use thereof
有权
等离子体灰化装置的调谐硬件及其使用方法
- Patent Title: Tuning hardware for plasma ashing apparatus and methods of use thereof
- Patent Title (中): 等离子体灰化装置的调谐硬件及其使用方法
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Application No.: US12621136Application Date: 2009-11-18
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Publication No.: US08906195B2Publication Date: 2014-12-09
- Inventor: Aseem K. Srivastava , Robert P. Couilliard
- Applicant: Aseem K. Srivastava , Robert P. Couilliard
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306 ; H01J37/32

Abstract:
A continuously variable microwave circuit capable of being tuned to operate under a plurality of distinct operating conditions, comprising: a waveguide comprising an adjustable tuning element having a core configured to protrude into the waveguide; an actuator in operative communication with the adjustable tuning element, wherein the actuator is operable to selectively vary a length of the core that is protruding into the waveguide so as to minimize reflected microwave power in the plasma asher; and a controller in operative communication with the actuator, wherein the controller is configured to selectively activate the actuator upon a change in the plurality of operating conditions.
Public/Granted literature
- US20110114115A1 TUNING HARDWARE FOR PLASMA ASHING APPARATUS AND METHODS OF USE THEREOF Public/Granted day:2011-05-19
Information query
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