Invention Grant
US08906766B2 Method for manufacturing semiconductor device with first and second gates over buried bit line
有权
用于在掩埋位线上制造具有第一和第二栅极的半导体器件的方法
- Patent Title: Method for manufacturing semiconductor device with first and second gates over buried bit line
- Patent Title (中): 用于在掩埋位线上制造具有第一和第二栅极的半导体器件的方法
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Application No.: US14308182Application Date: 2014-06-18
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Publication No.: US08906766B2Publication Date: 2014-12-09
- Inventor: Hyung Jin Park
- Applicant: SK Hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2010-0071529 20100723
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/115

Abstract:
A semiconductor device and a method for manufacturing the same are provided. The method includes forming a cell structure where a storage node contact is coupled to first and second channel layers formed on sidewalls and upper portions of a plurality of gates, thereby simplifying the manufacturing process of the device. The semiconductor device includes a bit line buried in a semiconductor substrate; the gates disposed over the semiconductor substrate buried with the bit line; a first plug disposed in a lower portion between the gates and coupled to the bit line; and a second plug coupled to the second channel layer.
Public/Granted literature
- US20140302651A1 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE WITH FIRST AND SECOND GATES OVER BURIED BIT LINE Public/Granted day:2014-10-09
Information query
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