Invention Grant
- Patent Title: Synthesis and characterization of first row transition metal complexes containing α-keto hydrazonate ligands as potential precursors for use in metal film deposition
- Patent Title (中): 含有α-酮基肼配体的第一排过渡金属络合物的合成和表征作为用于金属膜沉积的潜在前体
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Application No.: US13709564Application Date: 2012-12-10
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Publication No.: US08907115B2Publication Date: 2014-12-09
- Inventor: Charles H. Winter , Lakmal C. Kalutarage
- Applicant: Wayne State University
- Applicant Address: US MI Detroit
- Assignee: Wayne State University
- Current Assignee: Wayne State University
- Current Assignee Address: US MI Detroit
- Agency: Brooks Kushman P.C.
- Main IPC: C07F15/00
- IPC: C07F15/00 ; C07F13/00 ; C07F11/00 ; C23C16/00 ; C07F19/00 ; C23C16/455
Abstract:
A compound that is useful for forming a metal by reaction with a reducing agent is described by formula (I): wherein M is a metal selected from Groups 3 through 12 of the Periodic Table; R1 and R2 are each independently H or C1-C6 alkyl; and R3 is H or C1-C8 alkyl.
Public/Granted literature
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