Invention Grant
US08907394B2 Insulated gate semiconductor device having shield electrode structure 有权
具有屏蔽电极结构的绝缘栅半导体器件

Insulated gate semiconductor device having shield electrode structure
Abstract:
In one embodiment, a semiconductor device includes a multi-portion shield electrode structure formed in a drift region. The shield electrode includes a wide portion formed in proximity to a channel side of the drift region, and a narrow portion formed deeper in the drift region. The narrow portion is separated from the drift region by a thicker dielectric region, and the wide portion is separated from the drift region by a thinner dielectric region. That portion of the drift region in proximity to the wide portion can have a higher dopant concentration than other portions of the drift region.
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