Invention Grant
- Patent Title: Dual trench MOS transistor and method for forming the same
- Patent Title (中): 双沟道MOS晶体管及其形成方法
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Application No.: US14093596Application Date: 2013-12-02
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Publication No.: US08907413B1Publication Date: 2014-12-09
- Inventor: Qinhai Jin
- Applicant: Chip Integration Tech. Co., Ltd.
- Applicant Address: TW Zhubei, Hsinchu County
- Assignee: Chip Integration Tech. Co., Ltd.
- Current Assignee: Chip Integration Tech. Co., Ltd.
- Current Assignee Address: TW Zhubei, Hsinchu County
- Agency: McClure, Qualey & Rodack, LLP
- Priority: TW102122482A 20130624
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78

Abstract:
A dual trench MOS transistor comprises of the following elements. A plurality of trenches are formed in an n− epitaxial layer on a heavy doped n+ semiconductor substrate and spaced to each other by one mesa. Each the trench has a trench oxide layer formed on a bottom and sidewalls thereof. A first polysilicon layer is formed in the trenches. A plurality of recesses are formed in the mesas and spaced to each other with one sub-mesa. Each the recess has a recess oxide layer formed on a bottom and sidewalls thereof. A second polysilicon layer for serving as a gate is formed in the recesses. The mesas are implanted to have implanted areas at two side of the gate. The implanted areas and the first polysilicon layer are applied to serve as the source. The rear surface of the substrate is served as the drain.
Public/Granted literature
- US20140374820A1 DUAL TRENCH MOS TRANSISTOR AND METHOD FOR FORMING THE SAME Public/Granted day:2014-12-25
Information query
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