Invention Grant
- Patent Title: Composite substrate
- Patent Title (中): 复合基材
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Application No.: US14228452Application Date: 2014-03-28
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Publication No.: US08907547B2Publication Date: 2014-12-09
- Inventor: Tomoyoshi Tai , Yasunori Iwasaki , Yuji Hori , Takahiro Yamadera , Ryosuke Hattori , Kengo Suzuki
- Applicant: NGK Insulators, Ltd. , NGK Ceramic Device Co., Ltd.
- Applicant Address: JP Aichi
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Aichi
- Agency: Cermak Nakajima & McGowan LLP
- Agent Tomoko Nakajima
- Priority: JP2012-250071 20121114
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H03H9/25 ; H01L41/053 ; H01L41/083

Abstract:
A composite substrate according to the present invention includes a piezoelectric substrate that is a single-crystal lithium tantalate or lithium niobate substrate, a support substrate that is a single-crystal silicon substrate, and an amorphous layer joining together the piezoelectric substrate and the support substrate. The amorphous layer contains 3 to 14 atomic percent of argon. The amorphous layer includes, in order from the piezoelectric substrate toward the composite substrate, a first layer, a second layer, and a third layer. The first layer contains a larger amount of a constituent element (such as tantalum) of the piezoelectric substrate than the second and third layers. The third layer contains a larger amount of a constituent element (silicon) of the support substrate than the first and second layers. The second layer contains a larger amount of argon than the first and third layers.
Public/Granted literature
- US20140210317A1 Composite Substrate Public/Granted day:2014-07-31
Information query
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