Invention Grant
- Patent Title: Method of determining an electrical property of a test sample
- Patent Title (中): 确定试样的电性能的方法
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Application No.: US12676124Application Date: 2008-09-03
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Publication No.: US08907690B2Publication Date: 2014-12-09
- Inventor: Dirch H. Petersen , Ole Hansen
- Applicant: Dirch H. Petersen , Ole Hansen
- Applicant Address: DK Lyngby
- Assignee: Capres A/S
- Current Assignee: Capres A/S
- Current Assignee Address: DK Lyngby
- Agency: Klein, O'Neill & Singh, LLP
- Priority: EP07388066 20070903
- International Application: PCT/DK2008/000315 WO 20080903
- International Announcement: WO2009/030230 WO 20090312
- Main IPC: G01R31/20
- IPC: G01R31/20 ; G01R27/08 ; G01R33/06 ; G01R33/00 ; H01L21/66 ; G01R31/26

Abstract:
A method of obtaining an electrical property of a test sample, comprising a non-conductive area and a conductive or semi-conductive test area, by performing multiple measurements using a multi-point probe. The method comprising the steps of providing a magnetic field having field lines passing perpendicularly through the test area, bringing the probe into a first position on the test area, the conductive tips of the probe being in contact with the test area, determining a position for each tip relative to the boundary between the non-conductive area and the test area, determining distances between each tip, selecting one tip to be a current source positioned between conductive tips being used for determining a voltage in the test sample, performing a first measurement, moving the probe and performing a second measurement, calculating on the basis of the first and second measurement the electrical property of the test area.
Public/Granted literature
- US20100271059A1 METHOD OF DETERMINING AN ELECTRICAL PROPERTY OF A TEST SAMPLE Public/Granted day:2010-10-28
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