Invention Grant
- Patent Title: Exposure method for color filter substrate
- Patent Title (中): 滤色片基材的曝光方法
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Application No.: US13521963Application Date: 2011-01-07
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Publication No.: US08908302B2Publication Date: 2014-12-09
- Inventor: Kohei Matsui , Ryosuke Yasui
- Applicant: Kohei Matsui , Ryosuke Yasui
- Applicant Address: JP Tokyo
- Assignee: Toppan Printing Co., Ltd.
- Current Assignee: Toppan Printing Co., Ltd.
- Current Assignee Address: JP Tokyo
- Priority: JP2010-008534 20100118
- International Application: PCT/JP2011/000049 WO 20110107
- International Announcement: WO2011/086882 WO 20110721
- Main IPC: G02B5/22
- IPC: G02B5/22 ; G02B7/00 ; G02F1/1339 ; G02F1/1335 ; G03F7/00 ; G03F7/20 ; G02B5/20 ; G02F1/1333

Abstract:
An exposure method for color filter substrate is provided. As shown in FIG. 7(a), exposure is performed while a substrate 20 to which a photoresist has been applied is being transported in the Y direction, to simultaneously form first layers 81 and layers 91 in first non-display regions 51 (regions indicated by hatching sloping upward to the right) and the display region, respectively, on the substrate 20. Next, as shown in (b), the substrate 20 is rotated by 90 degrees, and exposure is performed while the substrate 20 is being transported in the X direction, to form second layers 82 in second non-display regions 52 (regions indicated by hatching sloping upward to the right). Thus, dummy PSs 71 and dummy PSs 72 arranged with desired pitches and having desired shapes can be formed in the first non-display regions 51 and the second non-display regions 52, respectively.
Public/Granted literature
- US20120287525A1 EXPOSURE METHOD FOR COLOR FILTER SUBSTRATE Public/Granted day:2012-11-15
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