Invention Grant
US08908957B2 Method for building rule of thumb of defect classification, and methods for classifying defect and judging killer defect based on rule of thumb and critical area analysis
有权
建立缺陷分类经验法则的方法，基于经验法则和关键区域分析的缺陷分类和判断凶手缺陷的方法
- Patent Title: Method for building rule of thumb of defect classification, and methods for classifying defect and judging killer defect based on rule of thumb and critical area analysis
- Patent Title (中): 建立缺陷分类经验法则的方法，基于经验法则和关键区域分析的缺陷分类和判断凶手缺陷的方法
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Application No.: US13338672Application Date: 2011-12-28
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Publication No.: US08908957B2Publication Date: 2014-12-09
- Inventor: Iyun Leu
- Applicant: Iyun Leu
- Applicant Address: TW Hsinchu County
- Assignee: Elitetech Technology Co.,Ltd.
- Current Assignee: Elitetech Technology Co.,Ltd.
- Current Assignee Address: TW Hsinchu County
- Agency: Li & Cai Intellectual Property (USA) Office
- Main IPC: G06K9/00
- IPC: G06K9/00
Abstract:
A method for building a rule of thumb of defect classification is illustrated. Multiple defect classification images with killer defects of examples and all material information of processes associated with the defect, the pattern, and the background are input into the fab tool. The fab tool obtains image characteristics, process characteristics, and image relativity characteristics of the defects, the pattern, and the background in each of the input images, wherein the input images comprises the defect classification images with killer defects of examples. The rule of thumb of the defect classification is built based on the process characteristics, the image characteristics, and the image relativity characteristics of the defects, the pattern, and the background in each of the input images.
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