Invention Grant
- Patent Title: Multi-point interferometric phase change detection method
- Patent Title (中): 多点干涉相变检测方法
-
Application No.: US13411891Application Date: 2012-03-05
-
Publication No.: US08909491B2Publication Date: 2014-12-09
- Inventor: Yeonjoon Park , Sang Hyouk Choi
- Applicant: Yeonjoon Park , Sang Hyouk Choi
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Adminstrator of the National Aeronautics and Space Adminstration
- Current Assignee: The United States of America as represented by the Adminstrator of the National Aeronautics and Space Adminstration
- Current Assignee Address: US DC Washington
- Agent Jennifer L. Riley; Thomas K. McBride, Jr.
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G01N21/45 ; G01B9/02

Abstract:
Provided is a method for measuring multi-point interferometric angle changes beginning with an interferometric device capable of measuring at least one main point and at least one reference point. The method includes recording interferometric intensity changes on two or more spots using the main point and the reference point, and determining a sequence having a plurality of peak, local maximas and a plurality of valley, local minimas. The method includes sampling a first, partial sequence and comparing it to a neighboring, partial sequence using a perturbation analysis and additional calculation(s) to compile all phase angle changes for all measured points. Also provided is a computer implemented method to enable nanometer resolution sensitivity in a noisy signal and for characterization of a material in an interferometric device.
Public/Granted literature
- US20120224185A1 Multi-Point Interferometric Phase Change Detection Method Public/Granted day:2012-09-06
Information query