Invention Grant
US08910092B1 Model based simulation method with fast bias contour for lithography process check 有权
基于模型的模拟方法,具有快速偏置轮廓的光刻过程检查

Model based simulation method with fast bias contour for lithography process check
Abstract:
Integrated circuit design techniques are disclosed. In some methods, a target layout design having a geometric pattern thereon is received. A set of fast-bias contour (FBC) rules is applied to the target layout design to provide an electronic photomask having FBC-edits. The FBC-edits differentiate the electronic photomask from the target layout design, and the FBC rules are applied without previously applying optical proximity correction (OPC) to the target layout design. A lithography process check is performed on the electronic photomask to determine whether a patterned integrated circuit layer, which is to be manufactured based on the electronic photomask, is expected to be in conformance with the geometric pattern of the target layout design.
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