Invention Grant
US08910092B1 Model based simulation method with fast bias contour for lithography process check
有权
基于模型的模拟方法,具有快速偏置轮廓的光刻过程检查
- Patent Title: Model based simulation method with fast bias contour for lithography process check
- Patent Title (中): 基于模型的模拟方法,具有快速偏置轮廓的光刻过程检查
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Application No.: US14078729Application Date: 2013-11-13
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Publication No.: US08910092B1Publication Date: 2014-12-09
- Inventor: I-Chang Shih , Feng-Yuan Chiu , Ying-Chou Cheng , Chiu Hsiu Chen , Ru-Gun Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Integrated circuit design techniques are disclosed. In some methods, a target layout design having a geometric pattern thereon is received. A set of fast-bias contour (FBC) rules is applied to the target layout design to provide an electronic photomask having FBC-edits. The FBC-edits differentiate the electronic photomask from the target layout design, and the FBC rules are applied without previously applying optical proximity correction (OPC) to the target layout design. A lithography process check is performed on the electronic photomask to determine whether a patterned integrated circuit layer, which is to be manufactured based on the electronic photomask, is expected to be in conformance with the geometric pattern of the target layout design.
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