Invention Grant
- Patent Title: Optical device and method of making
- Patent Title (中): 光学装置及制作方法
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Application No.: US13068129Application Date: 2011-05-03
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Publication No.: US08912549B2Publication Date: 2014-12-16
- Inventor: Nathaniel R. Quick , Aravinda Kar , Islam A. Salama
- Applicant: Nathaniel R. Quick , Aravinda Kar , Islam A. Salama
- Applicant Address: US FL Orlando
- Assignee: University of Central Florida
- Current Assignee: University of Central Florida
- Current Assignee Address: US FL Orlando
- Agency: Frijouf, Rust & Pyle P.A.
- Main IPC: H01L21/322
- IPC: H01L21/322 ; H01L31/0312 ; H01L31/0352 ; G01J5/08 ; G01K11/12 ; H01L21/268 ; G01J5/58

Abstract:
An optical device and method is disclosed for forming the optical device within the wide-bandgap semiconductor substrate. The optical device is formed by directing a thermal energy beam onto a selected portion of the wide-bandgap semiconductor substrate for changing an optical property of the selected portion to form the optical device in the wide-bandgap semiconductor substrate. The thermal energy beam defines the optical and physical properties of the optical device. The optical device may take the form of an electro-optical device with the addition of electrodes located on the wide-bandgap semiconductor substrate in proximity to the optical device for changing the optical property of the optical device upon a change of a voltage applied to the optional electrodes. The invention is also incorporated into a method of using the optical device for remotely sensing temperature, pressure and/or chemical composition.
Public/Granted literature
- US20110211249A1 Optical device and method of making Public/Granted day:2011-09-01
Information query
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