Invention Grant
- Patent Title: Heater block for a rapid thermal processing apparatus
- Patent Title (中): 加热器块用于快速热处理设备
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Application No.: US13391410Application Date: 2010-08-04
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Publication No.: US08913884B2Publication Date: 2014-12-16
- Inventor: Chang Kyo Kim , Tae Jong Ki , Choul Soo Kim , Ki Nam Kim
- Applicant: Chang Kyo Kim , Tae Jong Ki , Choul Soo Kim , Ki Nam Kim
- Applicant Address: KR Gyeonggi-Do
- Assignee: AP Systems Inc.
- Current Assignee: AP Systems Inc.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Occhiuti & Rohlicek LLP
- Priority: KR10-2009-0077425 20090821
- International Application: PCT/KR2010/005119 WO 20100804
- International Announcement: WO2011/021796 WO 20110224
- Main IPC: F26B3/30
- IPC: F26B3/30 ; H05B3/74

Abstract:
The present invention relates to a heater block for a rapid thermal processing apparatus, and more particularly, to a heater block in which heating lamps are densely arranged in a tessellation. The tessellation has a structure such that the plurality of heating lamps are arranged at right angles to form a zigzag line, and the thus-formed zigzagged line is repeated such that the zigzagged line is combined with the adjacent zigzagged line. According to the present invention, a temperature gradient caused by a void between heating lamps is prevented, and heating lamps are densely arranged to increase heat density for a heat radiation area as opposed to conventional heater blocks, thus achieving improved heat treatment efficiency using less energy. In addition, fully uniform temperature control is enabled, in terms of sector allocated temperature control, even when the area to be independently controlled is enlarged as opposed to conventional heater blocks, thereby simplifying the configuration of a temperature control circuit.
Public/Granted literature
- US20120207456A1 HEATER BLOCK FOR A RAPID THERMAL PROCESSING APPARATUS Public/Granted day:2012-08-16
Information query
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