Invention Grant
- Patent Title: Dose-data generating apparatus
- Patent Title (中): 剂量数据生成装置
-
Application No.: US13932023Application Date: 2013-07-01
-
Publication No.: US08914766B2Publication Date: 2014-12-16
- Inventor: Yosuke Okamoto , Takashi Koike
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2010-204437 20100913
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03H3/00 ; G03F1/00 ; H01L21/67
Abstract:
According to one embodiment, generating virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an outer side of a shot edge, and calculating dose data of the measurement region and a non-measurement region based on data in the measurement region and the virtual data are included.
Public/Granted literature
- US20130298087A1 DOSE-DATA GENERATING APPARATUS Public/Granted day:2013-11-07
Information query
