Invention Grant
US08916416B2 Semiconductor device and method of laser-marking laminate layer formed over eWLB with tape applied to opposite surface
有权
在eWLB上形成激光标记层压层的半导体器件和方法,其带对应于相对表面
- Patent Title: Semiconductor device and method of laser-marking laminate layer formed over eWLB with tape applied to opposite surface
- Patent Title (中): 在eWLB上形成激光标记层压层的半导体器件和方法,其带对应于相对表面
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Application No.: US12889588Application Date: 2010-09-24
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Publication No.: US08916416B2Publication Date: 2014-12-23
- Inventor: Glenn Omandam , Yaojian Lin , Hin Hwa Goh
- Applicant: Glenn Omandam , Yaojian Lin , Hin Hwa Goh
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/00 ; B23K26/00

Abstract:
A semiconductor device has a semiconductor die with a plurality of bumps formed on contact pads disposed over its active surface. An encapsulant is formed over the semiconductor die. An interconnect structure is formed over the semiconductor die and encapsulant. The semiconductor die is mounted to a translucent tape with the bumps embedded in the translucent tape. The translucent tape has layers of polyolefin, acrylic, and polyethylene terephthalate. A back surface of the semiconductor die undergoes backgrinding to reduce die thickness. The tape undergoes UV curing. A laminate layer is formed over the back surface of the semiconductor die. The laminate layer undergoes oven curing. The laminate layer is laser-marked while the tape remains applied to the bumps. The tape is removed after laser-marking the laminate layer. Alternately, the tape can be removed prior to laser-marking. The tape reduces die warpage during laser-marking.
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