Invention Grant
- Patent Title: Bipolar junction transistor with multiple emitter fingers
- Patent Title (中): 具有多个发射极指的双极结晶体管
-
Application No.: US13294671Application Date: 2011-11-11
-
Publication No.: US08916446B2Publication Date: 2014-12-23
- Inventor: Renata Camillo-Castillo , David L. Harame , Qizhi Liu , Ramana M. Malladi , John J. Pekarik
- Applicant: Renata Camillo-Castillo , David L. Harame , Qizhi Liu , Ramana M. Malladi , John J. Pekarik
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans LLP
- Agent Anthony J. Canale
- Main IPC: H01L21/331
- IPC: H01L21/331 ; H01L29/08 ; H01L29/732 ; H01L29/66

Abstract:
Methods for fabricating bipolar junction transistors, bipolar junction transistors, and design structures for a bipolar junction transistor. The bipolar junction transistor may include a plurality of emitters that are arranged in distinct emitter fingers. A silicide layer is formed that covers an extrinsic base layer of the bipolar junction transistor and that fills the gaps between adjacent emitters. Non-conductive spacers on the emitter sidewalls electrically insulate the emitters from the silicide layer. The emitters extend through the extrinsic base layer and the silicide layer to contact the intrinsic base layer. The emitters may be formed using sacrificial emitter pedestals in a replacement-type process.
Public/Granted literature
- US20130119508A1 BIPOLAR JUNCTION TRANSISTOR WITH MULTIPLE EMITTER FINGERS Public/Granted day:2013-05-16
Information query
IPC分类: