Invention Grant
- Patent Title: Optical system of a microlithographic projection exposure apparatus
- Patent Title (中): 微光刻投影曝光装置的光学系统
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Application No.: US14103150Application Date: 2013-12-11
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Publication No.: US08917433B2Publication Date: 2014-12-23
- Inventor: Ingo Saenger
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102012223217 20121214
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G03F7/20 ; G02B27/28

Abstract:
The invention relates to an optical system of a microlithographic projection exposure apparatus, comprising a mirror arrangement having a plurality of mirror elements which are adjustable independently of one another for the purpose of changing an angular distribution of the light reflected by the mirror arrangement, a polarization-influencing optical arrangement having at least one polarization-influencing component, wherein, by displacing the polarization-influencing component, a degree of overlap between the polarization-influencing component and the mirror arrangement can be set in a variable manner, and a deflection device having a respective reflection surface upstream and downstream of the mirror arrangement relative to the light propagation direction.
Public/Granted literature
- US20140168739A1 OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2014-06-19
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