Invention Grant
- Patent Title: Methods and systems for control of a surface modification process
- Patent Title (中): 用于控制表面改性过程的方法和系统
-
Application No.: US13144667Application Date: 2010-01-20
-
Publication No.: US08918198B2Publication Date: 2014-12-23
- Inventor: George Atanasoff
- Applicant: George Atanasoff
- Agency: Womble Carlyle
- International Application: PCT/US2010/021521 WO 20100120
- International Announcement: WO2010/085496 WO 20100729
- Main IPC: G06F19/00
- IPC: G06F19/00 ; H01L31/20 ; G05B13/04 ; G05B19/4097 ; G01B11/06 ; H01L31/18 ; H01L31/032
Abstract:
A method and system for modifying a substrate, such a thin film, solar panel or the like detects error and/or variance and, if needed, re-optimizes the product design and/or process parameters on the fly, so that product can meet the product specification. This allows for methods and systems of process control that can adaptively change the product design in real time.
Public/Granted literature
- US20110276166A1 METHODS AND SYSTEMS FOR CONTROL OF A SURFACE MODIFICATION PROCESS Public/Granted day:2011-11-10
Information query
