Invention Grant
- Patent Title: Electrical routing
- Patent Title (中): 电气路由
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Application No.: US14042214Application Date: 2013-09-30
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Publication No.: US08922870B2Publication Date: 2014-12-30
- Inventor: Ankur Jain , Roman C. Gutierrez
- Applicant: DigitalOptics Corporation MEMS
- Applicant Address: US CA San Jose
- Assignee: DigitalOptics Corporation MEMS
- Current Assignee: DigitalOptics Corporation MEMS
- Current Assignee Address: US CA San Jose
- Agency: Haynes and Boone, LLP
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/08 ; B81C1/00 ; B81B3/00 ; G03B3/10
Abstract:
An electronic device may have a MEMS device formed of a first conductive material. A trench may be formed in the MEMS device. A layer of non-conductive material may be formed in the trench. A second conductive material may be formed upon the non-conductive material.
Public/Granted literature
- US20140036342A1 Electrical Routing Public/Granted day:2014-02-06
Information query
