Invention Grant
- Patent Title: Methods for fabricating an electromechanical switch
- Patent Title (中): 制造机电开关的方法
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Application No.: US14031506Application Date: 2013-09-19
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Publication No.: US08925183B2Publication Date: 2015-01-06
- Inventor: Michel Despont , Ute Drechsler , Daniel Grogg , Christoph Hagleitner , Yu Pu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Priority: GB1215512.3 20120831
- Main IPC: H01H11/00
- IPC: H01H11/00 ; H01H65/00 ; H01H49/00 ; H01H59/00

Abstract:
A nano-electro-mechanical switch includes an input electrode, a body electrode, an insulating layer, an actuator electrode, an output electrode, and a cantilever beam adapted to flex in response to an actuation voltage applied between the body electrode and the actuator electrode. The cantilever beam includes the input electrode, the body electrode and the insulating layer, the latter separating the body electrode from the input electrode, the cantilever beam being configured such that, upon flexion of the cantilever beam, the input electrode comes in contact with the output electrode at a single mechanical contact point at the level of an end of the cantilever beam.
Public/Granted literature
- US20140059843A1 FOUR TERMINAL NANO-ELECTROMECHANICAL SWITCH WITH A SINGLE MECHANICAL CONTACT Public/Granted day:2014-03-06
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