Invention Grant
US08925367B2 Method of calibrating surface texture measurement device 有权
校准表面纹理测量装置的方法

Method of calibrating surface texture measurement device
Abstract:
A method of calibrating a surface texture measurement device includes obtaining Y-axis shape measurement data and a maximum diameter portion to obtain upper and lower maximum diameter portions of a reference sphere from Y-axis upper and lower shape data obtained by relatively moving in the Y-axis direction while a downward and an upward styluses are in contact with an upper and a lower surfaces, respectively, of the reference sphere; obtaining X-axis shape measurement data to obtain X-axis upper and lower shape data of the reference sphere by relatively moving in the X-axis direction while the downward stylus is in contact with the upper diameter portion and the upward stylus with the lower diameter portion of the reference sphere; and calculating offset amounts Δx and Δz of the upward and downward styluses from center coordinates O3 and O4 obtained from the shape data.
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