Invention Grant
US08925481B2 Systems and methods for measuring, monitoring and controlling ozone concentration
有权
用于测量，监测和控制臭氧浓度的系统和方法
- Patent Title: Systems and methods for measuring, monitoring and controlling ozone concentration
- Patent Title (中): 用于测量，监测和控制臭氧浓度的系统和方法
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Application No.: US13271449Application Date: 2011-10-12
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Publication No.: US08925481B2Publication Date: 2015-01-06
- Inventor: ShouQian Shao , Jay DeDontney , Jason Wright
- Applicant: ShouQian Shao , Jay DeDontney , Jason Wright
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: B05C11/10
- IPC: B05C11/10 ; G01N7/00 ; C23C16/52 ; C23C16/455
Abstract:
Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of a total mass flow and a corresponding change in a chamber pressure accepting the mixture flow, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to a vacuum processing chamber, enabling precision semiconductor processing.
Public/Granted literature
- US20130092084A1 Systems and Methods for Measuring, Monitoring and Controlling Ozone Concentration Public/Granted day:2013-04-18
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