Invention Grant
- Patent Title: Piezoelectric thin film element and method of manufacturing the same, droplet discharge head and inkjet recording device using the piezoelectric thin film element
- Patent Title (中): 压电薄膜元件及其制造方法，使用压电薄膜元件的液滴喷射头和喷墨记录装置
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Application No.: US13835987Application Date: 2013-03-15
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Publication No.: US08926069B2Publication Date: 2015-01-06
- Inventor: Masahiro Ishimori , Masaru Shinkai , Satoshi Mizukami
- Applicant: Masahiro Ishimori , Masaru Shinkai , Satoshi Mizukami
- Applicant Address: JP Tokyo
- Assignee: Ricoh Company, Ltd.
- Current Assignee: Ricoh Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2012-066087 20120322
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/047 ; H01L41/314 ; H01L41/09 ; H01L41/29 ; H01L41/318 ; B41J2/14 ; B41J2/16
Abstract:
A piezoelectric thin film element includes a vibration plate, a lower electrode provided on the vibration plate and made of a conductive oxide, a piezoelectric thin film provided on the lower electrode and made of a polycrystalline substance, and an upper electrode provided on the piezoelectric thin film, wherein the lower electrode includes a titanium oxide film formed on the vibration plate, a platinum film formed on the titanium oxide film, and a conductive oxide film formed on the platinum film and, the platinum film and the conductive oxide film being a solid film with no holes.
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