Invention Grant
- Patent Title: Ring light illuminator, beam shaper and method for illumination
- Patent Title (中): 环形照明器,光束整形器和照明方法
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Application No.: US13376417Application Date: 2011-07-25
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Publication No.: US08926152B2Publication Date: 2015-01-06
- Inventor: Dacian Burges
- Applicant: Dacian Burges
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- International Application: PCT/IB2011/053300 WO 20110725
- International Announcement: WO2012/014141 WO 20120202
- Main IPC: F21V7/04
- IPC: F21V7/04 ; G02B21/08 ; G01N21/88 ; F21V8/00 ; G02B19/00 ; G02B27/09

Abstract:
A ring light illuminator with annularly arranged light sources is disclosed. To each light source there corresponds a light collector, a homogenizing means for light from the light source, and an anamorphic system for imaging an output of the homogenizing means into an area to be illuminated. The anamorphic system compensates deformations of a cross-sectional area of a light beam in a surface to be illuminated due to an oblique angle of incidence of the light beam onto the surface. The homogenizing means in embodiments is a rod, into which light from the light collector is directed. The end of the rod opposite the light collector is imaged by the anamorphic system into the area to be illuminated on the surface. Also disclosed is a method for illumination.
Public/Granted literature
- US20120188786A1 RING LIGHT ILLUMINATOR, BEAM SHAPER AND METHOD FOR ILLUMINATION Public/Granted day:2012-07-26
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