Invention Grant
US08926258B2 Substrate supporting apparatus and substrate transporting apparatus with coupling magnets 有权
基板支撑装置和具有联接磁体的基板输送装置

Substrate supporting apparatus and substrate transporting apparatus with coupling magnets
Abstract:
A substrate supporting apparatus includes a substrate support that supports a substrate. A first connecting member is connected to the substrate support and includes a first magnet. A second connecting member faces the first connecting member and is connectable to a transport robot for transporting the substrate to a substrate holder. The second connecting member includes a second magnet magnetically coupled with the first magnet. A spacer is configured to hold an interval between the first connecting member and the second connecting member. The first connecting member and the second connecting member are relatively movable in a plane direction of the substrate via the spacer.
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