Invention Grant
- Patent Title: Multi-inlet vacuum pump
- Patent Title (中): 多进口真空泵
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Application No.: US13203309Application Date: 2010-02-23
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Publication No.: US08926266B2Publication Date: 2015-01-06
- Inventor: Christian Beyer , Markus Henry , Heinz Englaender
- Applicant: Christian Beyer , Markus Henry , Heinz Englaender
- Applicant Address: DE Cologne
- Assignee: Oerlikon Leybold Vacuum GmbH
- Current Assignee: Oerlikon Leybold Vacuum GmbH
- Current Assignee Address: DE Cologne
- Agency: Fay Sharpe LLP
- Priority: DE102009011082 20090228
- International Application: PCT/EP2010/052282 WO 20100223
- International Announcement: WO2010/097384 WO 20100902
- Main IPC: F04D19/04
- IPC: F04D19/04

Abstract:
A multi-inlet vacuum pump includes a first pump device (10) including a first rotor element (18) with a plurality of first rotor disks (20) serially arranged in the conveying direction (36), and a second pump device (12) including a further rotor element (26) with a plurality of second rotor disks (28) serially arranged in the conveying direction (36). A diameter of the second rotor disks (28) is at least partially larger than a diameter of the first rotor disks (20). A main inlet (32) sucks in a first fluid stream (34) with the first pump device (10). The first fluid stream (34) is conveyed in the direction of the further pump device (12). An intermediate inlet (38) sucks in a second fluid stream (40) with the second pump device (12). The second fluid stream (40) is conveyed in the direction of a pump outlet. A process of merging the two fluid streams (34,40) will occur within the second pump device (12), preferably between two adjacent second rotor disks (28) of the second pump device (12).
Public/Granted literature
- US20110311348A1 MULTI-INLET VACUUM PUMP Public/Granted day:2011-12-22
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