Invention Grant
- Patent Title: Uniformity during planarization of a disk
- Patent Title (中): 磁盘平面化时的均匀性
-
Application No.: US13414568Application Date: 2012-03-07
-
Publication No.: US08926400B2Publication Date: 2015-01-06
- Inventor: Neale M. Jones , Kurt A. Rubin
- Applicant: Neale M. Jones , Kurt A. Rubin
- Applicant Address: NL Amsterdam
- Assignee: HGST Netherlands B.V.
- Current Assignee: HGST Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Kunzler Law Group, PC
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24B5/02 ; B24B5/313

Abstract:
An apparatus, system, and method are provided for reducing edge damage of a disk during chemical mechanical polishing. The apparatus includes a disk carrier configured to receive a disk, the disk having an outside edge and an inside edge, a raised ring adjacent the outside edge of the disk and extending from a surface of the disk carrier to a height greater than a height of the disk, and a raised column adjacent the inside edge of the disk and having a height greater than a height of the disk. The system includes a disk carrier for receiving a disk, a raised ring adjacent the outside edge of each opening, and plugs insertable into a central opening in the disk and having a height greater than a height of the disk. The method includes providing the apparatus, inserting a disk into the apparatus, and polishing the disk.
Public/Granted literature
- US20130236678A1 UNIFORMITY DURING PLANARIZATION OF A DISK Public/Granted day:2013-09-12
Information query