Invention Grant
- Patent Title: Working electrode design for electrochemical processing of electronic components
- Patent Title (中): 电子元器件电化学处理工作电极设计
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Application No.: US13612661Application Date: 2012-09-12
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Publication No.: US08926820B2Publication Date: 2015-01-06
- Inventor: Charles L. Arvin , Raschid J. Bezama , Glen N. Biggs , Hariklia Deligianni , Tracy A. Tong
- Applicant: Charles L. Arvin , Raschid J. Bezama , Glen N. Biggs , Hariklia Deligianni , Tracy A. Tong
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Vazken Alexanian
- Main IPC: C25D21/00
- IPC: C25D21/00 ; C25D17/02 ; C25D17/12 ; C25D7/12 ; C25D5/04 ; C25D17/00

Abstract:
An electroplating apparatus including a plating tank for containing a plating electrolyte. A counter electrode, e.g., anode, is present in a first portion of the plating tank. A cathode system is present in a second portion of the plating tank. The cathode system includes a working electrode and a thief electrode. The thief electrode is present between the working electrode and the counter electrode. The thief electrode includes an exterior face that is in contact with the plating electrolyte that is offset from the plating surface of the working electrode. In one embodiment, the thief electrode overlaps a portion of the working electrode about the perimeter of the working electrode. In one embodiment, a method is provided of using the aforementioned electroplating apparatus that provides increased uniformity in the plating thickness.
Public/Granted literature
- US20130062209A1 WORKING ELECTRODE DESIGN FOR ELECTROCHEMICAL PROCESSING OF ELECTRONIC COMPONENTS Public/Granted day:2013-03-14
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