Invention Grant
US08927191B2 Resist composition, method of forming resist pattern and polymeric compound
有权
抗蚀剂组合物,抗蚀剂图案和高分子化合物的形成方法
- Patent Title: Resist composition, method of forming resist pattern and polymeric compound
- Patent Title (中): 抗蚀剂组合物,抗蚀剂图案和高分子化合物的形成方法
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Application No.: US13351716Application Date: 2012-01-17
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Publication No.: US08927191B2Publication Date: 2015-01-06
- Inventor: Junichi Tsuchiya , Daichi Takaki , Masatoshi Arai , Daiju Shiono , Tomoyuki Hirano
- Applicant: Junichi Tsuchiya , Daichi Takaki , Masatoshi Arai , Daiju Shiono , Tomoyuki Hirano
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JPP2011-006940 20110117
- Main IPC: G03F7/039
- IPC: G03F7/039 ; C08F226/06

Abstract:
A resist composition including a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, wherein the base component (A) includes a polymeric compound (A1) having a structural unit (a5) represented by general formula (a5-1). In the formula (a5-1), R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; each of Ra and Rb independently represents a hydrocarbon group which may have a substituent, and Ra and Rb may be mutually bonded to form a ring.
Public/Granted literature
- US20120183900A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN AND POLYMERIC COMPOUND Public/Granted day:2012-07-19
Information query
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