Invention Grant
US08927191B2 Resist composition, method of forming resist pattern and polymeric compound 有权
抗蚀剂组合物,抗蚀剂图案和高分子化合物的形成方法

Resist composition, method of forming resist pattern and polymeric compound
Abstract:
A resist composition including a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, wherein the base component (A) includes a polymeric compound (A1) having a structural unit (a5) represented by general formula (a5-1). In the formula (a5-1), R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; each of Ra and Rb independently represents a hydrocarbon group which may have a substituent, and Ra and Rb may be mutually bonded to form a ring.
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