Invention Grant
- Patent Title: Production method of resist composition for lithography
- Patent Title (中): 光刻抗蚀剂组合物的制备方法
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Application No.: US13605360Application Date: 2012-09-06
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Publication No.: US08927192B2Publication Date: 2015-01-06
- Inventor: Tsutomu Ogihara , Motoaki Iwabuchi
- Applicant: Tsutomu Ogihara , Motoaki Iwabuchi
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2011-235224 20111026
- Main IPC: B01D35/01
- IPC: B01D35/01 ; G03F7/004 ; G03F7/16 ; B01D36/00

Abstract:
A production method of a resist composition for lithography, including, at least: a filtering step for filtering a resist composition for lithography by a filter therethrough, wherein in the filtering step, the resist composition for lithography is passed through the filter after an interior of a vessel having the filter installed therein is kept under reduced pressure. There can be provided a resist composition for lithography capable of decreasing occurrences of defects such as coating defects and pattern defects.
Public/Granted literature
- US20130108958A1 PRODUCTION METHOD OF RESIST COMPOSITION FOR LITHOGRAPHY Public/Granted day:2013-05-02
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