Invention Grant
- Patent Title: Flexible, stretchable electronic devices
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Application No.: US13917302Application Date: 2013-06-13
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Publication No.: US08927338B1Publication Date: 2015-01-06
- Inventor: Stephen W. Bedell , Wilfried E. Haensch , Bahman Hekmatshoartabari , Ghavam G. Shahidi , Davood Shahrjerdi
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Otterstedt, Ellenbogen & Kammer, LLP
- Agent Louis J. Percello
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L27/12 ; H01L21/762

Abstract:
Fabrication methods are disclosed that facilitate the production of electronic structures that are both flexible and stretchable to conform to non-planar (e.g. curved) surfaces without suffering functional damage due to excessive strain. Electronic structures including CMOS devices are provided that can be stretched or squeezed within acceptable limits without failing or breaking. The methods disclosed herein further facilitate the production of flexible, stretchable electronic structures having multiple levels of intra-chip connectors. Such connectors are formed through deposition and photolithographic patterning (back end of the line processing) and can be released following transfer of the electronic structures to flexible substrates.
Public/Granted literature
- US20140367786A1 FLEXIBLE, STRETCHABLE ELECTRONIC DEVICES Public/Granted day:2014-12-18
Information query
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