Invention Grant
US08927365B2 Method of eDRAM DT strap formation in FinFET device structure
有权
FinFET器件结构中eDRAM DT带形成方法
- Patent Title: Method of eDRAM DT strap formation in FinFET device structure
- Patent Title (中): FinFET器件结构中eDRAM DT带形成方法
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Application No.: US13556437Application Date: 2012-07-24
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Publication No.: US08927365B2Publication Date: 2015-01-06
- Inventor: Veeraraghavan S. Basker , Sivananda Kanakasabapathy , Tenko Yamashita , Chun-Chen Yeb
- Applicant: Veeraraghavan S. Basker , Sivananda Kanakasabapathy , Tenko Yamashita , Chun-Chen Yeb
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Harrington & Smith
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
The specification and drawings present a new method, device and computer/software related product (e.g., a computer readable memory) are presented for realizing eDRAM strap formation in Fin FET device structures. Semiconductor on insulator (SOI) substrate comprising at least an insulator layer between a first semiconductor layer and a second semiconductor layer is provided. The (metal) strap formation is accomplished by depositing conductive layer on fins portion of the second semiconductor layer (Si) and a semiconductor material (polysilicon) in each DT capacitor extending to the second semiconductor layer. The metal strap is sealed by a nitride spacer to prevent the shorts between PWL and DT capacitors.
Public/Granted literature
- US20140030864A1 Method of eDRAM DT Strap Formation In FinFET Device Structure Public/Granted day:2014-01-30
Information query
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