Invention Grant
- Patent Title: Interconnect structures and methods of manufacturing of interconnect structures
- Patent Title (中): 互连结构和互连结构制造方法
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Application No.: US13886836Application Date: 2013-05-03
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Publication No.: US08927421B2Publication Date: 2015-01-06
- Inventor: Daniel C. Edelstein , Takeshi Nogami
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Catherine Ivers
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/532

Abstract:
Interconnect structures and methods of manufacturing the same are disclosed herein. The method includes forming a barrier layer within a structure and forming an alloy metal on the barrier layer. The method further includes forming a pure metal on the alloy metal, and reflowing the pure metal such that the pure metal migrates to a bottom of the structure, while the alloy metal prevents exposure of the barrier layer. The method further includes completely filling in the structure with additional metal.
Public/Granted literature
- US20130244424A1 INTERCONNECT STRUCTURES AND METHODS OF MANUFACTURING OF INTERCONNECT STRUCTURES Public/Granted day:2013-09-19
Information query
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