Invention Grant
US08927421B2 Interconnect structures and methods of manufacturing of interconnect structures 有权
互连结构和互连结构制造方法

Interconnect structures and methods of manufacturing of interconnect structures
Abstract:
Interconnect structures and methods of manufacturing the same are disclosed herein. The method includes forming a barrier layer within a structure and forming an alloy metal on the barrier layer. The method further includes forming a pure metal on the alloy metal, and reflowing the pure metal such that the pure metal migrates to a bottom of the structure, while the alloy metal prevents exposure of the barrier layer. The method further includes completely filling in the structure with additional metal.
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